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2026年第二届微纳米制造暨热扫描探针研讨会

2026年5月13日 | 杭州西湖区万怡酒店 (杭州) 
​活动简介

          本次研讨会将聚焦热扫描探针光刻(t-SPL)技术,结合前沿科研应用与实际操作演示,深入探讨其在纳米制造及纳米原位改性中的最新进展。

           通过专题报告与现场演示,参会者将全面了解 NanoFrazor 的热扫描探针光刻技术,并探索其在不同研究领域中的应用潜力。本次会议特别邀请了来自前沿研究机构的专家学者,分享扫描探针技术在新兴领域中的最新研究成果与应用进展。

​特邀报告人

Prof. Dr. Xiaorui Zheng (Westlake University)

Opportunities of Thermal Probe in Neuromorphic Devices

Abstract: Since the inventions of scanning tunneling microscope and atomic force microscope in 1980s, nanoscale imaging and manipulation capabilities have been greatly revolutionized. Particularly, scanning probe lithography has emerged as alternative subtractive/additive nanofabrication approaches, such as dip-pen nanolithography and thermal probe lithography. At Westlake University, our group investigates the fundamentals and applications of scanning probe technology and demonstrates unique phenomena and functional nanodevices for neuromorphic computing. In this presentation, I will introduce our recent findings in scanning probe-based fabrication, in-situ characterization and manipulation of novel materials and platforms. Unique phenomena and functional nanodevices in electronics and photonics have been achieved for neuromorphic computing, such as resistive switching, low-dimensional ferroelectrics, logic-in-memory, and dynamic light-matter interactions.

Dr. Jialiang Gao (Heidelberg Instruments Nano)

Thermal Scanning Probe Lithography with NanoFrazor : Principle and Applications

Abstract: Thermal scanning probe lithography (t-SPL), enabled by the NanoFrazor, is a direct-write nanolithography technique that employs an ultrasharp thermal tip for simultaneous patterning and inspection of nanoscale structures with high precision. Based on localized thermal decomposition of a resist material, t-SPL enables high-resolution, proximity-effect-free patterning, while integrated topography sensing provides in-situ imaging and closed-loop feedback for nanometer-scale accuracy. In this talk, I will provide an overview of how the unique capabilities of the NanoFrazor enable a range of novel applications. First, from a lithography perspective, I will present examples including nanometer-precision grayscale patterning for advanced photonic structures, and the integration of mix-and-match lithography with markerless overlay for complex low-dimensional devices. In the second part, I will highlight how t-SPL enables localized thermomechanical modification of materials, allowing deterministic tuning of structural and functional properties. Together, these capabilities establish t-SPL as a versatile platform for photonic, optoelectronic, and quantum technologies.

​研讨会日程

09:00 - 09:30

Registration

09:30 - 09:40

Welcome Remarks 

09:40 - 10:20

Jialiang Gao

Thermal Scanning Probe Lithography with NanoFrazor : Principle and Applications (Part 1)

10:20 - 10:50

Break

10:50 - 11:30

Xiaorui Zheng

Opportunities of Thermal Probe in Neuromorphic Devices

11:30 - 12:00

Open for Discussion

12:00 - 13:30

Lunch

13:30 - 14:10

Jialiang Gao

Thermal Scanning Probe Lithography with NanoFrazor : Principle and Applications (Part 2)

14:10 - 14:50

PAL Team (Heidelberg

Instruments Nano)

Live Demo with NanoFrazor

14:50 - 15:30

Break

15:30 - 15:40

Zhengming Wu (Heidel-

berg Instruments Nano)

Closing Remarks

注:会议日程可能根据实际情况进行调整

2026年5月13日 | 杭州西湖区万怡酒店(杭州市西湖区墩余路600号)

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